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Products overview

Measure the Invisible to Provide Deep Process Insight

Nova offers a comprehensive suite of dimensional, materials, and chemical metrology solutions combined with advanced modeling and machine learning. These enable semiconductor manufacturers to gain deeper insight throughout the production process, increase yield, and shorten time to market.

Dimensional Metrology

Dimensional Metrology

Dimensional MetrologyDimensional MetrologyMaterials MetrologyMaterials MetrologyChemical MetrologyChemical MetrologySoftware SolutionsSoftware SolutionsServicesServices

Translate Metrology Data
into Concise Insight

Nova’s integrated and standalone optical metrology platforms for optical critical dimensions (CD) and thin film measurements, increase productivity, reliability and accuracy for the manufacturing of the most advanced semiconductor technology nodes.

Nova WMC 
Nova WMC 
Nova MMSR+
Nova MMSR+
Nova Prism
Nova Prism
Nova i570® HP
Nova i570® HP
Nova i550®
Nova i550®
Nova i500®
Nova i500®
Nova T550®
Nova T550®
Nova T500®
Nova T500®
Nova VeloCD®
Nova VeloCD®
Read More About Dimensional MetrologySee Related Technologies

In-Line Materials Metrology for Semiconductor Manufacturing

Nova’s highly sensitive materials metrology, designed and proven for high-volume manufacturing in-line process control enable critical metrology solutions to enhance device functionality and manufacturing yield, while shortening time to results.

Nova Metrion®
Nova Metrion®
Nova Elipson®
Nova Elipson®
Nova VeraFlex® IV
Nova VeraFlex® IV
Nova VeraFlex® III+
Nova VeraFlex® III+
Nova VeraFlex® III
Nova VeraFlex® III
Nova QED
Nova QED
Nova RACS
Nova RACS
Read More About Materials MetrologySee Related Technologies

Rich, Industry-Standard
Chemical Analysis

Nova’s advanced, open and flexible chemical metrology solutions carry out chemical analysis and replenishment in real time to ensure high-quality electroplating processes for front-end metallization, backend packaging, IC substrate and high-end PCB processes.

Nova AncoFlex® 
Nova AncoFlex® 
Nova Ancolyzer®
Nova Ancolyzer®
Nova AncoScene®
Nova AncoScene®
Nova DMR®
Nova DMR®
Read More About Chemical MetrologySee Related Technologies

Pursuing Insights to
Simplify Complex Problems

Nova’s comprehensive software modeling solutions combine top-notch algorithms in the field of artificial intelligence, physical, geometrical and data- driven machine-learning modeling solutions, supported by a computational management layer, and centralized fleet Management and control. This comprehensive suite addresses the full gamut of modeling and application development needs for the most advanced technology nodes.

Nova Fleet Management®
Nova Fleet Management®
Nova Fit®
Nova Fit®
Nova MARS®
Nova MARS®
Nova QED
Nova QED
Nova RACS
Nova RACS
Read More About Software SolutionsSee Related Technologies

Global support services dedicated to your sucess

Nova’s Global Services is structured to support you through a product’s lifecycle, guide you towards your goal of achieving and maintaining high-quality yields, and meeting special metrology requirements

Read More About our Services
Products overview
Read More About our Services

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